Automatic Virtual Metrology System (AVM)


Brief Introduction

AVM use data of production machine to predict product quality when products are unmeasurable. Change random inspection with delayed feature into inspect all in real time.

AVM

Features and Functions

Collect tool data and control : Detect and control the abnormal data of tool in real time.
Fault reason tracking : Find the abnormal reason quickly and reduce the crash time of machine.
Inspection method and limitation period : Inspect all in real time instead of using random inspection with delayed feature.
Coordinate with APC Control: Provide better accuracy.


New Features and Functions in R2017a

Add auto create model function, Model Fan Out process optimized, also add auto create model function. This function can be customized according to process data type.
Add alarm system: Receive abnormal alarms e-mail in real time by different user setting. Also provide real time OCAP overview.


Benefits : Better uniformity control and improve gross profit margin

Change random inspection with delayed feature into inspect all in real time
Lower cost of time, measuring tool and improve Cpk
Decrease random inspection rate and reach inspect 100%
Increase tool available time
More stable quality of product

  • Applications

    • Metal micromachining
    • Automotive Wheel Manufacturing
    • TFT LCD / CVD, LIT Process
    • Semiconductor / PVD, CVD, CMP, Etch Process
    • LED MOCVD Process